发明名称 THERMO-SETTING DIE-BONDING FILM, DICING/DIE-BONDING FILM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a thermo-setting die-bonding film which is properly broken by tensile force under low temperature and also to provide an application thereof.SOLUTION: Disclosed is a thermo-setting die-bonding film in which, before thermal setting, a storage elastic modulus A at 0°C is 1 GPa or more, a loss elastic modulus B at 0°C is 500 MPa or less, a loss tangent C at 0°C is 0.1 or less, a glass-transition temperature D exceeds 0°C, and a ratio E of an absolute value of the glass-transition temperature D to the absolute value of the loss tangent C is 600 or more.
申请公布号 JP2015198116(A) 申请公布日期 2015.11.09
申请号 JP20140073962 申请日期 2014.03.31
申请人 NITTO DENKO CORP 发明人 SHISHIDO YUICHIRO;MISUMI SADAHITO;ONISHI KENJI
分类号 H01L21/52;C09J7/00;C09J7/02;C09J11/04;C09J201/00;H01L21/301 主分类号 H01L21/52
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