| 摘要 |
PROBLEM TO BE SOLVED: To provide a crystalline laminated structure capable of suppressing high resistance obtained in a heating step by an α-gallium oxide-based thin film having a corundum structure doped with impurities.SOLUTION: A crystalline laminated structure includes a ground substrate and an α-gallium oxide-based thin film having a corundum structure formed thereon directly or through another layer. In the α-gallium oxide-based thin film, the atomic ratio of gallium in metal elements in the α-gallium oxide-based thin film is 0.5 or higher, the film thickness is 1 μm or more, and at least a part is doped with impurities. |
