| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating liquid coating apparatus capable of forming a coating film highly precisely to a desired film thickness.SOLUTION: A coating head 7 has a discharge surface 7a formed into a semi-cylindrical shape extending in an X-axis direction or in the arrangement direction of a discharge port 7b. More specifically, the discharge surface 7a of the coating head 7 is formed such that a region, in which the discharge port 7b is opened, is formed into a horizontal plane 7a1 as a belt-like flat surface along the X-axis direction, and the two side portions of that belt-like horizontal plane 7a1 are formed into a circular arc face 7a2 extending to a side face 7A opposed in the Y-axis direction of the coating head 7. |
