发明名称 |
ECHTANT AND METHOD FOR MANUFACTURING DISPLAY DEVICE USING THE SAME |
摘要 |
Disclosed are an etchant and a method for manufacturing a display device using the same. The etchant comprises a persulfate, a fluorine compound, an inorganic acid, a nitrogen-containing heterocyclic compound, a sodium compound, a copper salt, an organic acid or an organic acid salt, an electron donating compound, and a solvent. |
申请公布号 |
KR20150124540(A) |
申请公布日期 |
2015.11.06 |
申请号 |
KR20140050924 |
申请日期 |
2014.04.28 |
申请人 |
SAMSUNG DISPLAY CO., LTD.;DONGWOO FINE-CHEM CO., LTD. |
发明人 |
CHOUNG, JONG HYUN;KIM, IN BAE;PARK, HONG SICK;KIM, SEON IL;KUK, IN SEOL;NAM, GI YONG;PARK, YOUNG CHUL;YU, IN HO;YOON, YOUNG JIN;LEE, SUCK JUN |
分类号 |
C09K13/06;C09K13/08;H01L21/306 |
主分类号 |
C09K13/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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