MANUFACTURING METHOD OF SINTERED REACTION BONDED SILICON NITRIDE WITH HIGH THERMAL CONDUCTIVITY

摘要

Provided is a method for producing reaction sintered silicon nitride having high thermal conductivity and suitable to be used for a heat insulation structure such as an electric device or the like. The present invention provides a method for producing a reaction sintered silicon nitride sintered body, the method comprising the steps of: milling a raw ingredient powder including an Si powder into a size of 1 micron or less; mixing and molding the milled Si powder and a sintering preparation; nitriding the molded product at 1350-1450^oC to form reaction bonded silicon nitride in the molded body; and producing a reaction sintered silicon nitride sintered body by post-sintering the reaction bonded silicon nitride at a temperature of 1850^oC or more. According to the present invention, a reaction sintered silicon nitride sintered body having high thermal conductivity can be provided.