Imprinted Memory

摘要

The present invention discloses an imprinted memory, more particularly a three-dimensional imprinted memory (3D-iP). Instead of photo-lithography, it uses imprint-lithography (also referred to as nano-imprint lithography, or NIL) to record data. For the sub-100 nm nodes, the data-template used by imprint-lithography is much less expensive than the data-mask used by photo-lithography.

主权项

1. A method of manufacturing an imprinted memory, comprising the steps of:
1) forming a data-coding layer; 2) transferring a data-pattern from a data-template to said data-coding layer using imprint-lithography; 3) forming a plurality of address lines coupled to said data-pattern; wherein said data-pattern represents data stored in said imprinted memory; the dimensional of said data-pattern is less than 100 nm; and, said data-template comprises nanometer-scale non-periodic pattern.