| 摘要 |
A beam shaping mask (1) having apertures (4) similar in shape to that of an aperture pattern (20) formed by laser processing a film (15), wherein the apertures (4) are formed such that the optical transmittance within the apertures (4) gradually decreases from the center toward the edges of the apertures, and such that the optical transmittance at the edges of the apertures is capable of ensuring at least the minimal laser intensity capable of laser processing the film (15). Thus, it is possible to prevent burrs (22) from being generated at the edges of the holes after laser processing is performed. |
