| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor process sensor and a method of characterizing a semiconductor process.SOLUTION: An integrated circuit includes a process sensor, a temperature sensor, and a voltage sensor. The process sensor is configured to sense a process parameter indicating a semiconductor process by which the integrated circuit is formed and to provide a characterization of the semiconductor process to an output of the process sensor on the basis of the sensed process parameter. The temperature sensor is configured to provide an indication of a temperature of the integrated circuit to an output of the temperature sensor, and the voltage sensor is configured to provide an indication of a power supply voltage level of the integrated circuit to an output of the voltage sensor. The output of the process sensor is coupled to at least one of the temperature sensor and the voltage sensor to compensate at least one of the indication of the temperature and the indication of the power supply voltage level. |
