| 发明名称 |
MASK AND METHOD OF FABRICATING SPACERS |
| 摘要 |
A mask and a method of fabricating spacers (2) using the mask (1). The mask (1) comprises a light transmitting region including an array of light transmitting holes (230), a light non-transmitting region and a phase shifting layer (240) formed in one of two adjacent light transmitting holes (230) of the mask for shifting phrase of lights passing through the light transmitting holes (230). Thus, a light intensity can be reduced or lowered to zero when the lights pass through a diffractive region of the two adjacent light transmitting holes (230). Therefore, a bridging effect between two adjacent spacers (2) is alleviated and even avoided during fabricating the spacers (2). |
| 申请公布号 |
US2015316797(A1) |
申请公布日期 |
2015.11.05 |
| 申请号 |
US201414416430 |
申请日期 |
2014.05.26 |
| 申请人 |
BOE TECHNOLOGY GROUP CO., LTD. ;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
CHEN Xiaochuan;XUE Hailin;CHE Chuncheng;JIANG Wenbo;LI Yue |
| 分类号 |
G02F1/1339;G02B5/30 |
主分类号 |
G02F1/1339 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A mask, comprising:
a light transmitting region including an array of light transmitting holes, a light non-transmitting region; and a phase shifting layer formed in one of two adjacent light transmitting holes of the mask for shifting phases of lights passing through the light transmitting holes. |
| 地址 |
Beijing CN |
