| 摘要 |
PROBLEM TO BE SOLVED: To improve estimation accuracy of polishing process progress.SOLUTION: A polishing progress estimation method supplies an abrasive pad for polishing an object to be polished with polishing abrasive liquid, presses the object to be polished against the abrasive pad supplied with the polishing abrasive liquid, and performs polishing (step S101). The estimation method includes: acquiring a measurement signal that is outputted by a sensor in the state where the polishing abrasive liquid after polishing the object to be polished faces at least any sensor of an electrostatic capacitance sensor, a magnetic sensor, and an eddy current sensor (an area B outside the object to be polished) (step S102); and estimating polishing progress of the polishing object on the basis of the acquired measurement signal (step S103). |
