| 发明名称 |
METHOD OF MANUFACTURING MASTER MOLD |
| 摘要 |
A method of manufacturing a master mold includes forming a plurality of replica resin layers using a mold; forming a replica template by bonding the plurality of replica resin layers on a template; forming a replica mold layer having a pattern corresponding to a pattern of the plurality of replica resin layers using the replica template; forming a flexible stamp having a pattern formed on a surface thereof using the replica mold layer; transferring the pattern formed on the surface of the flexible stamp to a mold resin; and forming a large area master mold by etching a surface of a substrate based on a pattern shape of the mold resin. |
| 申请公布号 |
US2015314488(A1) |
申请公布日期 |
2015.11.05 |
| 申请号 |
US201414557712 |
申请日期 |
2014.12.02 |
| 申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
HAHM Sukgyu;KIM Dongouk;PARK Joonyong;BAE Jihyun;SHIN Bongsu;LEE Sunghoon;LEE Hongseok;CHUNG Jaeseung |
| 分类号 |
B29C33/38 |
主分类号 |
B29C33/38 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing a master mold, the method comprising:
forming a plurality of replica resin layers using a mold; forming a replica template by bonding the plurality of replica resin layers on a template; forming a replica mold layer having a pattern corresponding to a pattern of the plurality of replica resin layers using the replica template; forming a flexible stamp having a pattern formed on a surface thereof using the replica mold layer; transferring the pattern formed on the surface of the flexible stamp to a mold resin; and forming the master mold having a large area by etching a surface of a substrate based on a pattern shape of the mold resin. |
| 地址 |
Suwon-si KR |
