发明名称 COMPOSITION FOR POLISHING
摘要 PROBLEM TO BE SOLVED: To provide a composition for polishing suitable for the polishing of a polishing object having a layer including the group IV material and also capable of preventing the dissolution of the group IV material.SOLUTION: Provided is a composition for polishing comprising: an oxidizer including halogen atoms; and an organic compound including amide bonds.
申请公布号 JP2015193714(A) 申请公布日期 2015.11.05
申请号 JP20140071918 申请日期 2014.03.31
申请人 FUJIMI INC 发明人 TAMADA SHUICHI
分类号 C09K3/14;B24B37/00;H01L21/304 主分类号 C09K3/14
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