| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a differential pressure detecting element, capable of suppressing the formation of a notch affecting deflection characteristics of a cantilever part in the vicinity of the hinge of the cantilever part to detect a flow rate with high accuracy.SOLUTION: The method for manufacturing a differential pressure detecting element including a cantilever part comprises the steps of: forming a depression on one surface of a first silicon substrate; preparing a second silicon substrate having an insulation layer formed on one surface to join the one surface of the first silicon substrate to the one surface of the second silicon substrate; forming a piezoresistance layer on the other surface of the second silicon substrate; forming a metal layer on the piezoresistance layer of the second silicon substrate; etching the second silicon substrate until the insulation layer is exposed from the other surface side of the second silicon substrate; forming a via hole from the other surface of the first silicon substrate to the depression by a dry etching method; and removing the insulation layer exposed on the bottom surface of the via hole. |
