Inspection Apparatus

摘要

An apparatus for inspecting flat objects, in particular wafers, containing an object holder, a camera arrangement having a camera for recording an image of at least one part of the object; and a drive arrangement for producing a relative movement between the camera arrangement and the object from a first recording position to at least one further recording position; is characterized in that the camera arrangement has at least one further camera; the object areas imaged in different cameras are at least partially different, wherein all cameras together simultaneously record only part of the total inspection area of the object; and each object point of the entire inspection area can be imaged at least once in one of the cameras as a result of the relative movement between the camera arrangement and the object, as produced with the drive arrangement.

主权项

1. Device for inspection of flat objects (20), in particular wafers, comprising
(a) an object holder (12) (b) a camera assembly (14) with a camera (16) for taking an image of at least a portion of the object (20); (c) a driving assembly for the generation of a relative movement between the camera assembly (14) and the object (20) from a first imaging position to at least one further imaging position; (d) wherein the camera assembly (14) comprises at least one further camera (16); (e) the object ranges imaged by different cameras (16) are at least partly different, wherein all cameras (16) together simultaneously detect only a portion of the same inspection range of the object (20); (f) each object point of the entire inspection range is imaged at least once by one of the cameras due to the relative movement between the camera assembly (14) and the object (20) generated with the driving assembly; and (g) the object (20), the object holder (12) or the camera assembly (14) is rotatable about an axis (44) perpendicular to the object plane of the cameras (16),characterized in that
(h) the relative movement from the first imaging position to at least one further imaging position between the camera assembly (14) and the object (20) is a rotation.