| 发明名称 |
IMPRINTING METHOD AND CURABLE COMPOSITION FOR IMPRINTING |
| 摘要 |
A curable composition for imprinting in a condensable gas atmosphere, wherein the maximum condensable gas solubility (gas/(curable composition+gas)) (g/g) is 0.1 or more and 0.4 or less, and the curable composition for imprinting has a viscosity of 40 cP or less at 23° C. The maximum condensable gas solubility is determined by charging a 9-ml brown bottle with 3 g of the curable composition, measuring the weight of the curable composition at 23° C. at 1 atm before and after bubbling of the condensable gas at a flow rate of 0.1 L/min for 15 minutes, and dividing the increased weight due to the bubbling by the total weight of the curable composition and the condensable gas. |
| 申请公布号 |
US2015315322(A1) |
申请公布日期 |
2015.11.05 |
| 申请号 |
US201314647943 |
申请日期 |
2013.11.26 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
Chiba Keiko;Ito Toshiki;Iimura Akiko;Kawasaki Youji;Yamashita Keiji;Kato Jun |
| 分类号 |
C08F222/20;B29C59/02;B29C59/16;C08F222/10;B29C59/00 |
主分类号 |
C08F222/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A curable composition for imprinting in a condensable gas atmosphere, wherein
the maximum condensable gas solubility (gas/(curable composition+gas)) (g/g) is 0.1 or more and 0.4 or less, and the curable composition for imprinting has a viscosity of 40 cP or less at 23° C., wherein the maximum condensable gas solubility is determined by charging a 9-ml brown bottle with 3 g of the curable composition, measuring the weight of the curable composition at 23° C. at 1 atm before and after bubbling of the condensable gas at a flow rate of 0.1 L/min for 15 minutes, and dividing the increased weight due to the bubbling by the total weight of the curable composition and the condensable gas. |
| 地址 |
Ohta-ku, Tokyo JP |
