发明名称 OPTICAL SCANNER
摘要 PROBLEM TO BE SOLVED: To provide an optical scanner, even when being driven with a high resonant frequency, capable of preventing deformation of a mirror by reducing a generating stress, while reducing an occurrence of nonlinear vibration.SOLUTION: The optical scanner includes: a mirror (10); a first drive beam (50) for swinging the mirror (10) around a first axis; and a second drive beam (70) for swinging the mirror (10) around a second axis. The second drive beam (70) includes a plurality of beams extending in a direction crossing with the direction of the second axis. In the plurality beams, adjacent beams are connected at ends thereof so as to have a zigzag shape as a whole. Each of the plurality of beams includes a rib 72 extending in the width direction of the beam and protruding from the surface of the beam.
申请公布号 JP2015194762(A) 申请公布日期 2015.11.05
申请号 JP20150113380 申请日期 2015.06.03
申请人 MITSUMI ELECTRIC CO LTD 发明人 YAMADA TSUKASA
分类号 G02B26/10;B81B3/00;G02B26/08 主分类号 G02B26/10
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