发明名称 ALUMINUM SUBSTRATE FOR A THIN FILM TRANSISTOR
摘要 A substrate comprises of a recrystallized aluminum alloy. An organic polymer layer coats the top surface of the aluminum substrate. A layer of one of: SiO2, SiN and Al2O3 is on the organic polymer and at least one electrode is adhered to the layer of one of: SiO2, SiN and Al2O3. A method comprises depositing an organic polymer on an aluminum substrate, annealing the aluminum substrate; depositing a layer of one of SiO2, SiN and Al2O3 on the organic polymer; and adhering an electrode to the layer of one of: SiO2, SiN and Al2O3.
申请公布号 US2015318403(A1) 申请公布日期 2015.11.05
申请号 US201514700991 申请日期 2015.04.30
申请人 ALCOA INC. 发明人 Levendusky Thomas L.;Shah Kirit;Gregory Marcia;VanBrookhoven Jeff S.;Hatalis Miltiadis K.
分类号 H01L29/786;H01L29/51;H01L21/477;H01L29/66 主分类号 H01L29/786
代理机构 代理人
主权项 1. A device comprising: a. a substrate comprised of a recrystallized aluminum alloy; b. an organic polymer on top surface of the aluminum substrate; C. a layer of one of: SiO2, SIN and Al2O3 on the organic polymer; and d. at least one electrode adhered to the layer of one of SiO2, SiN and Al2O3.
地址 Pittsburgh PA US