METHOD AND DEVICE FOR PURIFYING TUNGSTEN HEXAFLUORIDE BY MEANS OF CONTINUOUS RECTIFICATION

摘要

Provided are a device and method for purifying tungsten hexafluoride by means of continuous rectification. The device comprises a light component removal tower (3) and a heavy component removal tower (11). The method comprises the steps of: conveying tungsten hexafluoride to be purified to the light component removal tower (3) for rectification, conveying products at the bottom of the light component removal tower to the heavy component removal tower (11) for rectification, and collecting the purified tungsten hexafluoride on the top of the heavy component removal tower. The purity of the tungsten hexafluoride obtained by using the method can reach 99.9999%. The method is simple to operate, has relatively high yield, and reduces the cost.