The purpose of the present invention is to provide an ultrasonic milling vibrator monitoring a processing state and a processing degree of an object to be processed in real-time to perform ultrasonic-milling. Therefore, the present invention enables a milling device to flatten the surface or form a fine pattern.
申请公布号
KR20150124005(A)
申请公布日期
2015.11.05
申请号
KR20140049836
申请日期
2014.04.25
申请人
KOREA INSTITUTE OF MACHINERY & MATERIALS;LEE, JAE YOUNG
发明人
KIM, HYUN SE;LEE, YANG LAE;LEE, JAE YOUNG;PARK, JONG KWEON;LIM, EEI SU
