MANUFACTURING METHOD AND SYSTEM OF METAL NITRIDE FILM FOR DECORATIVE HIGH HARDENED COATING

摘要

The present invention relates to formation of a metal nitride coating film, efficiently forming a metal nitride coating film and achieving excellent film properties by double discharge of sputtering and an ion gun by sputtering of a metal element and simultaneous injection of argon and nitrogen into the ion gun. According to the present invention, the manufacturing method and system for a high hardness decorative metal nitride coating layer for exterior are suitable for mass production by achieving a high yield while executing a low temperature process due to the double discharge properties when compared with a metal nitride film formed by existing sputtering and are suitable for an exterior coating material of a mobile device, a camera, or the like by showing the morphology of the coating film with high hardness and excellent decorative properties.