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发明名称
super resolution film and lithography method using thereof
摘要
<p>본 발명의 일측면에 따르면 기판에 패턴을 형성하기 위한 광학 리소그래피 장치에서, 상기 기판에 탈착가능한 초해상막으로써, 상기 초해상막은 상부에 제1유전층이 위치하고, 하부에 제2유전층이 위치하며, 상기 제1유전층과 상기 제2유전층 사이에 상변화물질층이 위치하되, 상기 상변화물질층은 Sb-Se 화합물인 초해상막이 제공될 수 있다.</p>
申请公布号
KR101566263(B1)
申请公布日期
2015.11.05
申请号
KR20140024589
申请日期
2014.02.28
申请人
发明人
分类号
G03F7/20;H01L21/027
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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