ATOMIC FORCE MICROSCOPE HAVING PROBER

摘要

PROBLEM TO BE SOLVED: To contact a sample with a prober probe even while being scanned by an AFM capable of scanning the sample by driving a stage having a placed sample to perform an AFM measurement while supplying various kinds of stimuli.SOLUTION: A prober is attached to a stage so that a prober probe and a sample are relatively moved during scan. Thereby, a connection state of the prober probe and the sample is maintained as well as during rest even without synchronously operating the prober probe and a stage during scan.