| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a coating tool in which DLC coating film having excellent adhesion is coated.SOLUTION: There is provided a manufacturing method of coating tool in which diamond-like carbon coating film is coated on a surface of a base material by a filtered arc ion plating method, which includes: a step of installing a base material having a surface with arithmetic average roughness Ra at 0.06 μm or less and maximum height roughness Rz at 1.0 μm or less inside of a furnace, introducing gas mixture containing hydrogen gas into the furnace, applying bias voltage of -2500 V or more and -1500 V or less to the base material, and performing gas bombardment treatment for 60 minutes or more; and a step of coating diamond-like carbon coating film on the surface of the base material by using a graphite target. |
