EMS DEVICE HAVING A NON-ELECTRICALLY ACTIVE ABSORBER

摘要

This disclosure provides apparatus, systems and methods for an electromechanical systems (EMS) device having a non-electrically active absorber. In one aspect, the EMS device includes a stationary electrode over a substrate, a dielectric layer over the stationary electrode, an absorber over the dielectric layer, and a movable electrode over the absorber. The movable electrode is configured to move to a plurality of positions between the absorber and the movable electrode to define a plurality of gap heights. Furthermore, the absorber includes a non-electrically active material. In some implementations, the absorber can include an optical layer having a plurality of particles in an electrically insulating material.