| 摘要 |
PROBLEM TO BE SOLVED: To provide a LaNiOthin film having even film thickness in which there is no pinhole on a coating film, and there is no void caused by the pinhole after firing of the coating film.SOLUTION: While an Hamount, HO amount, and CO amount to be adsorbed to a substrate surface for 1 cm, on the substrate which is coated with a Pt electrode, are set to 1.0×10g or less, 2.7×10g or less, and 4.2×10g or less, a LaNiOthin film formation liquid composition is coated to the substrate surface and dried for forming a coating film, and after calcinating the coating film, the coating film is fired for forming a LaNiOthin film. |
