| 摘要 |
PROBLEM TO BE SOLVED: To provide a rolling bearing in which a hard film having sufficient durability even in a high-load environment is formed on a raceway face or a rolling face of a bearing part.SOLUTION: A DLC film is formed on a raceway face or a rolling face of a rolling bearing which comprises a bearing part having the raceway face and a bearing part having the rolling face. The DLC film is composed of carbon, silicon, and hydrogen, an Si-H coupling exists, and an absolute value of residual stress is not larger than 0.12 GPa. The DLC film is formed by a method for film-forming the film to a thickness of 1.6 μm or thinner by a spattering method for introducing a hydrocarbon gas, by using a silicon target and a carbon target, and by controlling a temperature of the raceway face or the rolling face of the bearing part which is formed of bearing steel within a range of 150 to 180°C. |
