| 摘要 |
PROBLEM TO BE SOLVED: To provide a replica mold in which an imprint mold that is an original plate, and the outside of a pattern region have the same shape, and a manufacturing method thereof.SOLUTION: A transfer material layer is formed on one surface of a transfer base material and the transfer material layer and an imprint mold including an uneven pattern are embossed, thereby forming a transfer pattern in which the uneven pattern is inverted, on the transfer material layer. A resin layer is formed on a top face of the transfer pattern, and a resin pattern that is positioned and sized to cover a region of the transfer pattern, is formed in the resin layer. The transfer material layer outside of the region of the transfer pattern is removed by etching a transfer material while using the resin pattern as an etching mask, and the resin pattern is removed. Thus, the replica mold in which the outside of the region of the transfer pattern has the same shape as the outside of the region of the uneven pattern of the imprint mold, is manufactured on the transfer base material. |
