发明名称 PHOTOSENSITIVE RESIN MATERIAL AND RESIN FILM
摘要 A photosensitive resin material of the invention is a photosensitive resin material used to form a permanent film including one or more selected from a novolac-type phenol resin, a phenol aralkyl resin, and a hydroxystyrene resin as an alkali-soluble resin (A) and a photosensitive diazoquinone compound as a photosensitizing agent (B), in which a content of iron with respect to all non-volatile components, which is measured through flameless atomic absorption spectroscopy, is equal to or more than 0.005 ppm and equal to or less than 80 ppm, and non-ionic iron is included as the iron.
申请公布号 US2015316845(A1) 申请公布日期 2015.11.05
申请号 US201514698904 申请日期 2015.04.29
申请人 SUMITOMO BAKELITE CO., LTD. 发明人 TANAKA Yuma
分类号 G03F7/004;G03F7/038 主分类号 G03F7/004
代理机构 代理人
主权项 1. A photosensitive resin material used to form a permanent film, comprising: one or more selected from a novolac-type phenol resin, a phenol aralkyl resin, and a hydroxystyrene resin as an alkali-soluble resin (A); and a photosensitive diazoquinone compound as a photosensitizing agent (B), wherein a content of iron with respect to all non-volatile components, which is measured through flameless atomic absorption spectroscopy, is equal to or more than 0.005 ppm and equal to or less than 80 ppm, and non-ionic iron is included as the iron.
地址 Tokyo JP