| 摘要 |
PROBLEM TO BE SOLVED: To achieve a measurement range of differential pressure multiplied.SOLUTION: An annular diaphragm is provided being divided in a state of surrounding a differential pressure diaphragm 1, and one is used as a static pressure diaphragm 2 and the other is used as a static pressure diaphragm 3. The other surface (undersurface) of the static pressure diaphragm 2 is used as a reference pressure, and a measured pressure Pa toward one surface of the differential pressure diaphragm 1 is branched and guided to one surface (upper surface) of the static pressure diaphragm 2. With one surface of the static pressure diaphragm 3 used as a reference pressure, a measured pressure Pb toward the other surface of a differential pressure diaphragm 1 is branched and guided to the other surface of the static pressure diaphragm 3. A differential pressure &Dgr;P obtained from the differential pressure diaphragm 1 is outputted as a differential pressure of a low pressure range &Dgr;P, and a differential pressure &Dgr;Pab between a static pressure Pa obtained from the static pressure diaphragm 2 and a static pressure Pb obtained from the static pressure diaphragm 3 is outputted as a differential pressure of a high pressure range &Dgr;P. |
