摘要 |
PROBLEM TO BE SOLVED: To ensure removal by laser beam irradiation in manufacturing a flexible device.SOLUTION: A manufacturing method for a flexible device including a functional layer comprises: irradiating a laminate including a transparent substrate, a resin layer 13 formed on the transparent substrate, and the functional layer formed on the resin layer 13, with first and second laser beams LB1, LB2 so that the beams enter the same region R from the transparent substrate side in first and second directions different from each other; and causing interlayer removal between the transparent substrate and the resin layer 13 or between the resin layer 13 and the functional layer. |