发明名称 METHOD AND APPARATUS FOR MANUFACTURING FLEXIBLE DEVICE
摘要 PROBLEM TO BE SOLVED: To ensure removal by laser beam irradiation in manufacturing a flexible device.SOLUTION: A manufacturing method for a flexible device including a functional layer comprises: irradiating a laminate including a transparent substrate, a resin layer 13 formed on the transparent substrate, and the functional layer formed on the resin layer 13, with first and second laser beams LB1, LB2 so that the beams enter the same region R from the transparent substrate side in first and second directions different from each other; and causing interlayer removal between the transparent substrate and the resin layer 13 or between the resin layer 13 and the functional layer.
申请公布号 JP2015194642(A) 申请公布日期 2015.11.05
申请号 JP20140073137 申请日期 2014.03.31
申请人 TOSHIBA CORP 发明人 SAKANO TATSUNORI;MIURA KENTARO;UEDA TOMOMASA;SAITO NOBUMI;NAKANO SHINTARO;MAEDA YUYA;YAMAGUCHI HAJIME
分类号 G09F9/00;B23K26/00;B23K26/351;B23K26/57 主分类号 G09F9/00
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