CORROSION RESISTANT MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a corrosion resistant member excellent in low dust emission properties and corrosion resistance.SOLUTION: Provided is a corrosion resistant member in which the corrosion resistant face at least exposed to a corrosive gas and its plasma includes SiOas the main component, and comprising AlOand rare earth oxides and further comprising one or more kinds of oxides selected from the group 4 elements.