COATING APPARATUS AND COATING METHOD

摘要

The purpose of the present invention is to prevent coating liquid from getting around to the back by means of a simple configuration, such that a high quality product is provided while the cost is reduced during a coating step. This coating apparatus (30) is provided with: a holding means (311) for holding a substrate (S) under coating conditions in which the normal line direction with respect to a coating surface of the substrate (S) intersects the gravity direction at an angle (α) defined using the following conditional expression (1); and a coating means (40) for coating with coating liquid the coating surface of the substrate (S) held by the holding means (311); provided that the conditional expression (1) is -90° < α < 90° ••• (1).