发明名称 ELECTROLYTE FOR ELECTRODEPOSITION AND METHOD OF PRODUCING METAL FILM
摘要 PROBLEM TO BE SOLVED: To provide an electrolyte for electrodeposition which makes it possible to form a metal film having a smooth surface by electrodeposition at a relatively low temperature, and can be removed by water washing after the formation of the metal film, and a method of producing a metal film.SOLUTION: An electrolyte for electrodeposition comprises potassium ions, fluoride ions, chloride ions, and metal ions.
申请公布号 JP2015193899(A) 申请公布日期 2015.11.05
申请号 JP20140230911 申请日期 2014.11.13
申请人 SUMITOMO ELECTRIC IND LTD;KYOTO UNIV 发明人 NITTA KOJI;YASUDA KOJI;NOHIRA TOSHIYUKI;MAEDA KAZUMA
分类号 C25D3/66;H01L21/288 主分类号 C25D3/66
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