发明名称 |
Array Substrate and Method for Manufacturing the Same, and Display Device |
摘要 |
Embodiments of the invention disclose an array substrate and a method for manufacturing the same, and a display device. The method for manufacturing an array substrate comprising: forming a gate metal layer, wherein the gate metal layer comprises gate lines; film-forming an active layer and film-forming a signal line metal layer, wherein the signal line metal layer comprises data lines; and forming both a pattern of the active layer and a pattern of the signal line metal layer simultaneously using a half-tone mask process, wherein after film-forming the active layer and before film-forming the signal line metal layer, the method further comprising: hollowing out a first region of the active layer through a patterning process, wherein the first region is below the data lines in a display area, and the first region excludes portions of the active layer corresponding to overlapping regions of the data lines and the gate lines. |
申请公布号 |
US2015318310(A1) |
申请公布日期 |
2015.11.05 |
申请号 |
US201414498066 |
申请日期 |
2014.09.26 |
申请人 |
BOE TECHNOLOGY GROUP CO., LTD. ;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. |
发明人 |
ZHANG Wenyu;XIE Zhenyu;GUO Jian |
分类号 |
H01L27/12;G02F1/1362;H01L29/06;G02F1/1368;H01L29/786;H01L29/66 |
主分类号 |
H01L27/12 |
代理机构 |
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代理人 |
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主权项 |
1. A method for manufacturing an array substrate comprising: a step of forming a gate metal layer, wherein the gate metal layer comprises gate lines; a step of film-forming an active layer and a step of film-forming a signal line metal layer, wherein the signal line metal layer comprises data lines; and a step of forming both a pattern of the active layer and a pattern of the signal line metal layer simultaneously using a half-tone mask process, wherein after the step of film-forming an active layer and before the step of film-forming a signal line metal layer, the method further comprises a step of:
hollowing out a first region of the active layer through a patterning process, wherein the first region is below the data lines in a display area, and the first region excludes portions of the active layer corresponding to overlapping regions of the data lines and the gate lines. |
地址 |
Beijing CN |