发明名称 Array Substrate and Method for Manufacturing the Same, and Display Device
摘要 Embodiments of the invention disclose an array substrate and a method for manufacturing the same, and a display device. The method for manufacturing an array substrate comprising: forming a gate metal layer, wherein the gate metal layer comprises gate lines; film-forming an active layer and film-forming a signal line metal layer, wherein the signal line metal layer comprises data lines; and forming both a pattern of the active layer and a pattern of the signal line metal layer simultaneously using a half-tone mask process, wherein after film-forming the active layer and before film-forming the signal line metal layer, the method further comprising: hollowing out a first region of the active layer through a patterning process, wherein the first region is below the data lines in a display area, and the first region excludes portions of the active layer corresponding to overlapping regions of the data lines and the gate lines.
申请公布号 US2015318310(A1) 申请公布日期 2015.11.05
申请号 US201414498066 申请日期 2014.09.26
申请人 BOE TECHNOLOGY GROUP CO., LTD. ;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 ZHANG Wenyu;XIE Zhenyu;GUO Jian
分类号 H01L27/12;G02F1/1362;H01L29/06;G02F1/1368;H01L29/786;H01L29/66 主分类号 H01L27/12
代理机构 代理人
主权项 1. A method for manufacturing an array substrate comprising: a step of forming a gate metal layer, wherein the gate metal layer comprises gate lines; a step of film-forming an active layer and a step of film-forming a signal line metal layer, wherein the signal line metal layer comprises data lines; and a step of forming both a pattern of the active layer and a pattern of the signal line metal layer simultaneously using a half-tone mask process, wherein after the step of film-forming an active layer and before the step of film-forming a signal line metal layer, the method further comprises a step of: hollowing out a first region of the active layer through a patterning process, wherein the first region is below the data lines in a display area, and the first region excludes portions of the active layer corresponding to overlapping regions of the data lines and the gate lines.
地址 Beijing CN