| 摘要 |
PROBLEM TO BE SOLVED: To suppress responsiveness variations of driving signal caused by a difference in wiring resistance between a plurality of piezoelectric elements.SOLUTION: The entire lengths of wiring are different between piezoelectric elements 36 and a driver IC among a plurality of piezoelectric elements 36. As for the partial piezoelectric elements 36 having the long entire lengths of the wiring, capacitors 49 are serially connected to the piezoelectric elements 36. Each of the capacitors 49 includes an insulator 34, and a lower capacitor electrode 46 and an upper capacitor electrode 47 which are disposed to hold the insulator 34. Further, the insulator 34 is formed of the same piezoelectric material as that of an activator 32a of the piezoelectric element 36. |
