发明名称 |
Array Substrate and Manufacturing Method Thereof, Display Panel and Display Device |
摘要 |
The present invention provides an array substrate and a manufacturing method thereof, a display panel and a display device. The array substrate includes a plurality of pixel units, each of which includes: a TFT area provided with a TFT including a gate, a gate insulation layer, an active area, a source and a drain; and a display area provided with a pixel electrode. |
申请公布号 |
US2015318311(A1) |
申请公布日期 |
2015.11.05 |
申请号 |
US201314348434 |
申请日期 |
2013.12.16 |
申请人 |
BOE Technology Group Co., Ltd. |
发明人 |
Cheng Jun;Chen Haijing;Jiang Chunsheng |
分类号 |
H01L27/12;H01L21/467;H01L29/45;H01L29/423;H01L29/66;H01L29/786 |
主分类号 |
H01L27/12 |
代理机构 |
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代理人 |
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主权项 |
1. A manufacturing method of an array substrate, the array substrate including a plurality of pixel units, each of which includes: a thin film transistor (TFT) area provided with a thin film transistor including a gate, a gate insulation layer, a source, a drain and an active area; and a display area provided with a pixel electrode, wherein the manufacturing method of an array substrate includes steps of:
forming a pattern including the gate on a substrate through a patterning process, and forming the gate insulation layer; forming patterns including the active area and an etching stop area provided on the active area through a patterning process, on the substrate subjected to the above step; forming a transparent conductive layer film, and forming patterns including the source and the drain from the transparent conductive layer film through a patterning process; and forming a pattern including the pixel electrode from the transparent conductive layer film through a patterning process. |
地址 |
Beijing CN |