| 发明名称 |
MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT |
| 摘要 |
A MEMS structure includes: a substrate; a lower electrode disposed above the substrate; an upper electrode including a movable portion disposed facing and spaced from the lower electrode; and a projection projecting from a surface of the movable portion on a side facing the lower electrode, the projection being composed of a material different from that of the movable portion. |
| 申请公布号 |
US2015315011(A1) |
申请公布日期 |
2015.11.05 |
| 申请号 |
US201514698034 |
申请日期 |
2015.04.28 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
INABA Shogo;EBINA Akihiko;KINUGAWA Takuya |
| 分类号 |
B81B3/00;B81C1/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS structure comprising:
a substrate; a fixed electrode disposed above the substrate; a movable electrode including a movable portion disposed facing and spaced from the fixed electrode; and a projection projecting from at least one of a surface of the fixed electrode on a side facing the movable portion and a surface of the movable portion on a side facing the fixed electrode, the projection including a material different from that of the fixed electrode or the movable portion. |
| 地址 |
Tokyo JP |
