| 摘要 |
The present invention relates to a coating system using a sputter and, more specifically, to a coating system for operating multiple sputter sources stably using a single power means. The coating system using a sputter according to the present invention comprises: multiple sputter sources; a single power means connected to supply power to the sputter sources; multiple measuring means connected to measure the values of electric currents coming into the sputter sources respectively; a gas supply means including a gas supply part for supplying gas to the sputter sources and multiple flow rate adjusting parts connected to the sputter sources respectively to adjust the flow rate of gas coming out of the gas supply part; and a control means for receiving the values of the electric currents measured by the measuring means and controlling the flow rate adjusting parts to maintain the electric currents coming into the sputter sources to be constant. According to the present invention, costs for manufacturing the device can be reduced as the multiple sputter sources can be operated stably with a single power means by using the measuring means and the control means. |
