EDGE SCAN AND ALIGNMENT

摘要

A method for laser drilling holes in a substrate (210) is provided. A position of a polygonal mirror facet (253) is determined by a first sensor (335) and a position of a substrate disposed on a belt is determined by a second sensor (305, 260). The positions of the mirror facet and the substrate are synchronized based upon time inputs determined by the first sensor and second sensor, respectively. The position of the substrate may be changed by moving the belt (215) to be synchronized with the facet position prior to laser drilling. A laser (242) may be triggered when the positions of the mirror facet and the substrate have been synchronized. The laser may form one or more rows of holes in the substrate.