发明名称 ガスバリア性フィルム、ガスバリア性フィルムの製造方法及び電子デバイス
摘要 <p>There is provided a gas barrier film which has high barrier performance and is excellent in bending resistance and smoothness as well as cutting processing suitability; a method for producing the gas barrier film; and an electronic device in which the gas barrier film is used. A gas barrier film, comprising a gas barrier layer unit on at least one surface side of a base, wherein the gas barrier layer unit comprises a first barrier layer formed by a chemical vapor deposition method, a second barrier layer obtained by performing conversion treatment to a coating film formed by coating a silicon compound onto the first barrier layer and an intermediate layer between the first barrier layer and the base.</p>
申请公布号 JP5803937(B2) 申请公布日期 2015.11.04
申请号 JP20120547803 申请日期 2011.11.30
申请人 发明人
分类号 B32B9/00;B05D7/24;C23C16/42 主分类号 B32B9/00
代理机构 代理人
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