| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a plotting data creating program, a plotting data creating device and a plotting data creating method capable of sizing pre-processing plotting data disposed so that shot diagrams each associated with dosage amount are overlapped with each other. <P>SOLUTION: A post-processing plotting data creation program 41 is a program for creating a piece of post-processing plotting data 2f for plotting a plotting shape on a mask on the basis of a piece of pre-processing plotting data 2 including plural pre-processing shot diagrams 3 (3-1 to 3-12) in which neighboring pre-processing shot diagrams 3 are overlapped with each other. A sizing device 30 functions as a storage 40 that stores the pre-processing plotting data 2, and a sizing control section 51 that creates post-processing shot diagrams 3e (3e-1 to 3e-12) in which the pre-processing plotting data 2 in the storage 40 is corrected for each of pre-processing shot diagrams 3 and creates the post-processing plotting data 2f by re-disposing the post-processing shot diagrams 3e. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
