| 摘要 |
<p>To provide a substrate storage container capable of keeping low a relative humidity in an internal closed space for a long period of time even after purging, a substrate storage container 1 comprises a constitutive material, which includes a shell body 2, a door 4 and an on-off valve 8, defining the internal closed space 3, the constitutive material being formed of a specific constitutive material having a water absorption of 0.1 wt.% or less when immersed in water at 23 degree C for 24 hours, and thereby, an actual requirement is objectively satisfied in terms of water release suppression ability under JIS K 7209 or ISO 62 to significantly suppress releasing of water into the internal closed space 3 through the shell body 2, the door 4 and the on-off valve 8.</p> |
