| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a wavelength variable interference filter which prevents deterioration in gap accuracy between reflection films due to a temperature change. <P>SOLUTION: The wavelength variable interference filter comprises: a fixed substrate 51; a movable substrate 52 which faces the fixed substrate 51 and can be displaced with respect to the fixed substrate 51; a first reflection film 54 formed on a surface of the fixed substrate 51 facing the movable substrate 52; a second reflection film 55 which is provided with the movable substrate 52 and faces the first reflection film 54 through a gap; a first electrode 57 provided on a surface of the fixed substrate 51 facing the movable substrate 52; a second electrode 58 which is provided with the movable substrate 52 and faces the first electrode 57, and has a positive thermal expansion coefficient; and an additional film 70 which is laminated in the second electrode 58 and has a negative thermal expansion coefficient. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
