| 摘要 |
<p>Provided are: an ultrasound probe with excellent characteristic stability; and ultrasound equipment that uses the ultrasound probe. The ultrasound probe (1) has an ultrasonic transmitting and receiving element (2) provided with a substrate (5), an insulating film formed on the substrate (5), a cavity (17) formed between the substrate (5) and the insulating film, and a pair of electrodes (7, 11) disposed parallel to the substrate so as to sandwich the cavity (17). The ultrasound probe (1) is characterized in that the ultrasonic transmitting and receiving element (2) has a beam part (100) with a multilayer structure formed by laminating films made of materials different in stress, the beam part (100) being disposed on the electrode (11) distant from the substrate (5) out of the pair of electrodes (7, 11), and the beam part (100) is formed by laminating a film that applies tensile stress and a film that applies compressive stress.</p> |
