发明名称 圧電アクチュエータ、液体移送装置及び圧電アクチュエータの製造方法
摘要 <p>A piezoelectric actuator is provided, including a piezoelectric layer which is joined to a joining member and which has a coefficient of linear expansion smaller than a coefficient of linear expansion of the joining member; a first electrode which is arranged on one surface of the piezoelectric layer; a second electrode which is arranged on a portion of the one surface of the piezoelectric layer different from the first electrode and which is in conduction with the first electrode; and a low dielectric layer which is formed between the piezoelectric layer and the second electrode and which has a dielectric constant lower than a dielectric constant of the piezoelectric layer.</p>
申请公布号 JP5803528(B2) 申请公布日期 2015.11.04
申请号 JP20110217728 申请日期 2011.09.30
申请人 发明人
分类号 H01L41/09;B41J2/14;B41J2/16;H01L41/047;H01L41/257 主分类号 H01L41/09
代理机构 代理人
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