| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a nano gap electrode which significantly reduces applied current and process time during electromigration without conducting a process where a conductive film is formed and then energized to form a nano gap. <P>SOLUTION: Metal electrodes 80, 81 are formed on an insulation substrate 70. A conductive material is deposited on the insulation substrate while applying a voltage or a current, which induces electromigration, between the metal electrodes, to form a conductive fine line having a nano scale gap. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
