Processes and systems for purifying silane

摘要

Processes and systems for purifying silane-containing streams and, in particular, for purifying silane-containing streams that also contain ethylene are disclosed. The processes and systems may be arranged such that one or more ethylene reactors are downstream of light-end distillation operations.

主权项

1. A process for purifying a silane-containing stream, the stream comprising silane, ethylene and one or more compounds with a boiling point less than silane, the process comprising:
introducing the silane-containing stream into a reactor to convert ethylene to at least one of ethylsilane and ethane and to produce an ethylene-depleted stream relative to the silane-containing stream; and introducing the ethylene-depleted stream into a heavy-ends distillation column to produce a silane-enriched overhead fraction and a silane-depleted bottoms fraction relative to the ethylene-depleted stream, the silane-depleted bottoms fraction being enriched in at least one of ethylsilane and ethane relative to the ethylene-depleted stream; and introducing the overhead fraction produced from the heavy-ends distillation column into a light-ends distillation column to produce a silane-depleted overhead fraction and a silane-enriched bottoms fraction relative to the overhead fraction produced from the heavy-ends distillation column, the silane-depleted overhead fraction being enriched in compounds with a boiling point less than silane relative to the overhead fraction produced from the heavy-ends distillation column.