Micro/nano multiaxial inertial sensor of movements

摘要

The multiaxial inertial sensor of movements is a micro/nano sensor that makes it possible to couple at least one accelerometer with other structures, either accelerometers or gyroscopes, by an oscillating disk structure. The oscillating disk also forms an inertial sensor such as a gyrometer. This single-chip structure associating both gyroscopes and accelerometers makes it possible to achieve detections and measurements in up to 6 axes, in other words 3 accelerometer axes and 3 gyroscope axes, and to exert control by a single and unique electronic unit, thus permitting a single automatic control loop in excitation and a single electronic reading chip.;Application to technologies known as MEMS.

主权项

1. A multiaxial inertial sensor of movements, comprising:
a first sensor; a second sensor; a coupling structure coupled in rotation around a Z axis and configured to induce transmission of movement between, respectively:
the first sensor with a first excitation mass having a first degree of freedom in translation along a first excitation axis in a plane XY perpendicular to the Z axis, andthe second sensor with a second excitation mass having a second degree of freedom in translation along a second excitation axis of the plane XY, the second excitation axis of the second excitation mass being different from the first excitation axis of the first excitation mass, wherein the coupling structure is provided with an oscillating element, the oscillations of which in the XY plane around the Z axis are transmitted thereto by the kinetic energy of excitation of an exciter; and an oscillating disk gyroscope in the XY plane with one degree of freedom in rotation around the Z axis and comprising:
a central ring coupled with an outer excitation ring forming the coupling structure at least partly, the central ring having at least one degree of freedom in rotation around a first axis of the XY plane and transmitting a Coriolis force at least partly in order to measure a rotational movement around a second axis of the XY plane, perpendicular to the first axis,wherein the outer excitation ring is laterally coupled with the excitation masses of the first sensor and of the second sensor to transmit linear excitation movements in the XY plane to them.