High-frequency semiconductor package and high-frequency semiconductor device

摘要

Certain embodiments provide a high-frequency semiconductor package including: a base which is made of metal and is a grounding portion; a multi-layer wiring resin substrate; a first internal conductor film; and a lid. The multi-layer wiring resin substrate is provided on a top surface of the base, and has a frame shape in which a first cavity from which the top surface of the base is exposed is formed. The first internal conductor film covers surfaces which form a top surface of the multi-layer wiring resin substrate and an inner wall surface of the first cavity, and is electrically connected with the base. The lid is attached onto the multi-layer wiring resin substrate, and seals and covers the first cavity.

主权项

1. A high-frequency semiconductor package comprising:
a base which is made of metal and is a grounding portion; a frame-shaped multi-layer wiring resin substrate which is provided on a top surface of the base and in which a first cavity from which the top surface of the base is exposed is formed, wherein the frame-shaped multi-layer wiring resin substrate includes an internal electrode which is formed on a top surface of the multi-layer wiring resin substrate, an external connection terminal which is formed on a bottom surface of the multi-layer wiring resin substrate so as to be insulated from the base, and a through-hole which electrically connects the internal electrode and the external connection terminal; a first internal conductor film which covers the top surface of the multi-layer wiring resin substrate and an inner wall surface of the first cavity, and is electrically connected with the base; a lid which is attached onto the multi-layer wiring resin substrate and seals and covers the first cavity; a first groove which is provided from a lateral surface of the external connection terminal to a lateral surface of the multi-layer wiring resin substrate; and a first lateral surface conductor film which is provided in the first groove, wherein the first lateral surface conductor film is provided to be insulated from the first internal conductor film.