| 摘要 |
Disclosed is a method for removing a fluoride-based compound adhesive. The method comprises the following steps: allowing an object, to which the fluoride-based compound adhesive is attached, to be supported on a support; and spraying CO_2 dry ice onto the fluoride-based compound adhesive attached to the object to remove the fluoride-based compound adhesive from the object. In the step of spraying the CO_2 dry ice, the CO_2 dry ice having a particle size of 100 to 3000 um is accelerated by pressure of 1 to 5 bar to be sprayed. |
